Effect of damage incubation in the laser grooving of sapphire
Melville, NY / American Inst. of Physics (2019) [Journal Article]
Journal of applied physics
Volume: 125
Issue: 17
Page(s): 173109
Authors
Selected Authors
Sakurai, Haruyuki
He, Chao
Konishi, Kuniaki
Tamaru, Hiroharu
Yumoto, Junji
Other Authors
Kuwata-Gonokami, Makoto
Gillner, Arnold
Identifier
- DOI: 10.1063/1.5091951
- REPORT NUMBER: RWTH-2019-04655