Increasing productivity of ultrashort pulsed laser ablation for commercialization of micro structuring

Bellingham, Washington, USA / SPIE (2018) [Buchbeitrag, Beitrag zu einem Tagungsband]

Nanoengineering: Fabrication, Properties, Optics, and Devices XV : 21-23 August 2018, San Diego, California, United States / Balaji Panchapakesan, Anne E. Sakdinawat, André-Jean Attias, Elizabeth A. Dobisz (editors) ; sponsored and published by: SPIE
Seite(n): 107300H