Spatially Resolved Spectroscopic Extreme Ultraviolet Reflectometry for Laboratory Applications
Stevenson Ranch, Calif / American Scientific Publ. (2019) [Journal Article]
Journal of nanoscience and nanotechnology
Volume: 19
Issue: 1
Page(s): 562-567
Authors
Selected Authors
Tryus, Maksym
Herbert, Stefan
Wilson, Daniel
Bahrenberg, Lukas
Danylyuk, Serhiy
Other Authors
Juschkin, Larissa
Identifier
- DOI: 10.1166/jnn.2019.16470
- REPORT NUMBER: RWTH-2018-230322