Laser beam micro forming as a new adjustment technology using dedicated actuator structures

Bellingham, Wash / SPIE (2003) [Beitrag zu einem Tagungsband]

Smart sensors, actuators, and MEMS : 19 - 21 May 2003, Maspalomas, Gran Canaria, Spain / sponsored and publ. by SPIE, the International Society for Optical Engineering. Jung-Chih Chiao ..., chairs/ed.. - Pt. 1
Seite(n): 285-294

Autorinnen und Autoren

Autorinnen und Autoren

Olowinsky, Alexander
Bosse, Ludger